Accessed:

TDMAS

Spectra

Structural identifiers

Names and synonyms

(Me2N)3SiH

15112-89-7

[RN]

239-165-0

[EINECS]

MFCD00048006

[MDL number]

N,N,N′,N′,N″, N″-Hexamethylsilanetriamine

N,N,N′,N′,N″,N″-Hexamethylsilanetriamine

[ACD/IUPAC Name]

N,N,N′,N′,N″,N″-Hexaméthylsilanetriamine

[French]

[ACD/IUPAC Name]

N,N,N′,N′,N″,N″-Hexamethylsilantriamin

[German]

[ACD/IUPAC Name]

Silanetriamine, N,N,N′,N′,N″,N″-hexamethyl-

[ACD/Index Name]

TDMAS

Tris(dimethylamido)silane

Tris(dimethylamino)silane

3dmas : [(ch3)2n]3sih

99%

99+%, contained in 50 ml Swagelok cylinder for CVD/ALD

99715-91-0

[RN]

[BIS(DIMETHYLAMINO)SILYL]DIMETHYLAMINE

N-[bis(dimethylamino)silyl]-N-methylmethanamine

Tris (dimethylamino ) silane

TRIS SILANE

tris(dimethylamino)silicon

Database IDs